Inventor
RAYANDAYAN RONALD
US5 patents
Patents
5 patentsUS7456113B2Nov 25, 2008
Cleaning method and solution for cleaning a wafer in a single wafer process
APPLIED MATERIALS INC23 citations92
US7402520B2Jul 22, 2008
Edge removal of silicon-on-insulator transfer wafer
APPLIED MATERIALS INC23 citations89
US7657390B2Feb 2, 2010
Reclaiming substrates having defects and contaminants
APPLIED MATERIALS INC2 citations61
US7951718B2May 31, 2011
Edge removal of silicon-on-insulator transfer wafer
APPLIED MATERIALS INC4 citations59
US7659206B2Feb 9, 2010
Removal of silicon oxycarbide from substrates
APPLIED MATERIALS INC2 citations57