Inventor
CHOI HOON-SANG
KR10 patents
⚠️ This page may combine multiple inventors who share the name “CHOI HOON-SANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS8546270B2Oct 1, 2013
Atomic layer deposition apparatus
SAMSUNG ELECTRONICS CO LTD8 citations82
US7759718B2Jul 20, 2010
Method manufacturing capacitor dielectric
SAMSUNG ELECTRONICS CO LTD7 citations73
US7824501B2Nov 2, 2010
In-situ method of cleaning vaporizer during dielectric layer deposition process
SAMSUNG ELECTRONICS CO LTD2 citations62
US7791125B2Sep 7, 2010
Semiconductor devices having dielectric layers and methods of forming the same
SAMSUNG ELECTRONICS CO LTD4 citations62
US10879248B2Dec 29, 2020
Semiconductor devices including capacitors and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD3 citations60
US7939872B2May 10, 2011
Multi-dielectric films for semiconductor devices and methods of fabricating multi-dielectric films
SAMSUNG ELECTRONICS CO LTD2 citations60
US8357593B2Jan 22, 2013
Methods of removing water from semiconductor substrates and methods of depositing atomic layers using the same
SAMSUNG ELECTRONICS CO LTD0 citations52