Inventor
YU LIANZHONG
US21 patents
⚠️ This page may combine multiple inventors who share the name “YU LIANZHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HONEYWELL INT INC
8 patentsUS7024934B2Apr 11, 2006
Vibrating beam accelerometer
HONEYWELL INT INC32 citations92
US6938334B2Sep 6, 2005
Vibrating beam accelerometer two-wafer fabrication process
HONEYWELL INT INC24 citations92
US7469588B2Dec 30, 2008
MEMS vertical comb drive with improved vibration performance
HONEYWELL INT INC24 citations91
US7238999B2Jul 3, 2007
High performance MEMS packaging architecture
HONEYWELL INT INC42 citations91
US7479402B2Jan 20, 2009
Comb structure fabrication methods and systems
HONEYWELL INT INC13 citations84
US7442589B2Oct 28, 2008
System and method for uniform multi-plane silicon oxide layer formation for optical applications
HONEYWELL INT INC3 citations59
US7482192B2Jan 27, 2009
Method of making dimple structure for prevention of MEMS device stiction
HONEYWELL INT INC5 citations57
US7976714B2Jul 12, 2011
Single SOI wafer accelerometer fabrication process
HONEYWELL INT INC1 citations52
INPUT OUTPUT INC
6 patentsUS6315423B1Nov 13, 2001
Micro machined mirror
INPUT OUTPUT INC85 citations96
US6454421B2Sep 24, 2002
Dual axis micro machined mirror device
INPUT OUTPUT INC38 citations92
US6805008B2Oct 19, 2004
Accelerometer with folded beams
INPUT OUTPUT INC45 citations91
US7152473B1Dec 26, 2006
Integrated and multi-axis sensor assembly and packaging
INPUT OUTPUT INC18 citations79
US6617098B1Sep 9, 2003
Merged-mask micro-machining process
INPUT OUTPUT INC10 citations71
US6458513B1Oct 1, 2002
Temporary bridge for micro machined structures
INPUT OUTPUT INC5 citations62