Inventor
KADKLY AZMI
US6 patents
⚠️ This page may combine multiple inventors who share the name “KADKLY AZMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS7385688B1Jun 10, 2008
Multi-spot illumination and collection optics for highly tilted wafer planes
KLA TENCOR TECH CORP17 citations82
US7746459B2Jun 29, 2010
Systems configured to inspect a wafer
KLA TENCOR TECH CORP7 citations72
US7345752B1Mar 18, 2008
Multi-spot illumination and collection optics for highly tilted wafer planes
KLA TENCOR TECH CORP4 citations61