Inventor

YOSHIKAWA TADAYOSHI

JP7 patents

⚠️ This page may combine multiple inventors who share the name “YOSHIKAWA TADAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINKO ELECTRIC IND CO

2 patents

US11521885B2Dec 6, 2022

Substrate fixing device

SHINKO ELECTRIC IND CO1 citations59

US9837297B2Dec 5, 2017

Tray and wafer holding apparatus

SHINKO ELECTRIC IND CO0 citations50

YOSHIKAWA TADAYOSHI

1 patent

US8441772B2May 14, 2013

Substrate for electrostatic chuck and electrostatic chuck

YOSHIKAWA TADAYOSHI44 citations90

SAITO MIKI

1 patent

US8505928B2Aug 13, 2013

Substrate temperature control fixing apparatus

SAITO MIKI8 citations76

MITSUI PETROCHEMICAL IND

1 patent

US4230762AOct 28, 1980

Asphalt water-proofing material

MITSUI PETROCHEMICAL IND29 citations76

NIPPON TUNGSTEN

1 patent

US9120704B2Sep 1, 2015

Dielectric layer for electrostatic chuck and electrostatic chuck

NIPPON TUNGSTEN2 citations58

FURUMURA YUJI

1 patent

US8686743B2Apr 1, 2014

Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus

FURUMURA YUJI0 citations51