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Inventor
MITSUMORI TAKAHIRO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “MITSUMORI TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUMORI TAKAHIRO
2 patents
US8967608B2
Mar 3, 2015
Glass substrate-holding tool and method for producing an EUV mask blank by employing the same
MITSUMORI TAKAHIRO
521 citations
95
US8837108B2
Sep 16, 2014
Glass substrate-holding tool and method for producing an EUV mask blank by employing the same
MITSUMORI TAKAHIRO
0 citations
38
ASAHI GLASS CO LTD
1 patent
US8356494B2
Jan 22, 2013
Process for producing porous quartz glass object, and optical member for EUV lithography
ASAHI GLASS CO LTD
2 citations
61
KOIKE AKIO
1 patent
US8590342B2
Nov 26, 2013
Method for producing TiO2-SiO2 glass body, method for heat-treating TiO2-SiO2 glass body, TiO2-SiO2 glass body, and optical base for EUVL
KOIKE AKIO
4 citations
59