Inventor

ASAMI YU

JP2 patents

Patents

2 patents

US9299531B2Mar 29, 2016

Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method

NUFLARE TECHNOLOGY INC7 citations77

US8987683B2Mar 24, 2015

Charged particle beam drawing apparatus and charged particle beam drawing method

NUFLARE TECHNOLOGY INC1 citations48