Inventor
KERSCHER MICHAEL
DE3 patents
Patents
3 patentsUS8999516B2Apr 7, 2015
Polycrystalline silicon rod and process for production thereof
WACKER CHEMIE AG3 citations60
US9481578B2Nov 1, 2016
Polycrystalline silicon rod and process for production thereof
WACKER CHEMIE AG0 citations50
US10400329B2Sep 3, 2019
Process for the preparation of polycrystalline silicon
WACKER CHEMIE AG0 citations42