Inventor
WEI TZU-HUI
TW6 patents
Patents
6 patentsUS11664237B2May 30, 2023
Semiconductor device having improved overlay shift tolerance
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10032640B1Jul 24, 2018
Formation of semiconductor structure with a photoresist cross link and de-cross link process
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations72
US12211700B2Jan 28, 2025
Selective removal of an etching stop layer for improving overlay shift tolerance
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10998225B2May 4, 2021
Semiconductor device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11830910B2Nov 28, 2023
Semiconductor structure having air gaps and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US10867805B2Dec 15, 2020
Selective removal of an etching stop layer for improving overlay shift tolerance
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50