Inventor
YASHIRO MASANORI
JP11 patents
Patents
11 patentsUS10038295B2Jul 31, 2018
Gas laser apparatus
GIGAPHOTON INC6 citations83
US9722384B2Aug 1, 2017
Gas laser apparatus
GIGAPHOTON INC4 citations83
US10879664B2Dec 29, 2020
Laser gas regeneration system and laser system
GIGAPHOTON INC1 citations62
US11081850B2Aug 3, 2021
Gas laser apparatus
GIGAPHOTON INC0 citations61
US10971883B2Apr 6, 2021
Gas laser apparatus
GIGAPHOTON INC0 citations61
US10892592B2Jan 12, 2021
Laser gas purifying system and laser system
GIGAPHOTON INC1 citations61
US10666008B2May 26, 2020
Gas laser apparatus
GIGAPHOTON INC0 citations51
US10164396B2Dec 25, 2018
Laser unit and non-transitory computer-readable storage medium
GIGAPHOTON INC0 citations51
US9825417B2Nov 21, 2017
Laser unit and non-transitory computer-readable storage medium
GIGAPHOTON INC1 citations51
US9093814B2Jul 28, 2015
Optical device, and laser chamber and gas laser apparatus using the same
GIGAPHOTON INC0 citations51
US12155168B2Nov 26, 2024
Line narrowing gas laser device and electronic device manufacturing method
GIGAPHOTON INC0 citations46