Inventor
SON SAE IL
KR5 patents
Patents
5 patentsUS7157366B2Jan 2, 2007
Method of forming metal interconnection layer of semiconductor device
SAMSUNG ELECTRONICS CO LTD12 citations82
US8993436B2Mar 31, 2015
Method for fabricating semiconductor device that includes forming passivation film along side wall of via hole
SAMSUNG ELECTRONICS CO LTD4 citations68
US7972958B2Jul 5, 2011
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations60
US12100596B2Sep 24, 2024
Methods of manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations45
US10872808B2Dec 22, 2020
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations32