Inventor
CHIANG CHENG-HSUEN
TW4 patents
Patents
4 patentsUS12411404B2Sep 9, 2025
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11906898B2Feb 20, 2024
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10739671B2Aug 11, 2020
Method of manufacturing phase shift photo masks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10908494B2Feb 2, 2021
Photomask and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42