Inventor

SHIH HSAO

TW2 patents

Patents

2 patents

US10459332B2Oct 29, 2019

Mask blank and fabrication method thereof, and method of fabricating photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48

US10908494B2Feb 2, 2021

Photomask and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42