Inventor
PEIJSTER JERRY JOHANNES MARTINUS
NL13 patents
⚠️ This page may combine multiple inventors who share the name “PEIJSTER JERRY JOHANNES MARTINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PEIJSTER JERRY JOHANNES MARTINUS
7 patentsUS9268216B2Feb 23, 2016
Projection system with flexible coupling
PEIJSTER JERRY JOHANNES MARTINUS2 citations59
US9939728B2Apr 10, 2018
Vacuum chamber with a thick aluminum base plate
PEIJSTER JERRY JOHANNES MARTINUS1 citations49
US9163664B2Oct 20, 2015
Guidance for target processing tool
PEIJSTER JERRY JOHANNES MARTINUS0 citations49
US9030649B2May 12, 2015
Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device
PEIJSTER JERRY JOHANNES MARTINUS1 citations49
US9703213B2Jul 11, 2017
Substrate processing apparatus
PEIJSTER JERRY JOHANNES MARTINUS1 citations47
US8905369B2Dec 9, 2014
Vibration isolation module and substrate processing system
PEIJSTER JERRY JOHANNES MARTINUS0 citations44
US9199829B2Dec 1, 2015
Assembly and a method for lifting a module of a lithography system in a vertical direction and a lithography system comprising such assembly
PEIJSTER JERRY JOHANNES MARTINUS0 citations38
MAPPER LITHOGRAPHY IP BV
3 patentsUS10048599B2Aug 14, 2018
Adjustment assembly and substrate exposure system comprising such an adjustment assembly
MAPPER LITHOGRAPHY IP BV4 citations71
US9829804B1Nov 28, 2017
Substrate holding device, method for manufacturing such a device, and use of such a device in a lithography system
MAPPER LITHOGRAPHY IP BV4 citations70
US10324385B2Jun 18, 2019
Substrate processing apparatus
MAPPER LITHOGRAPHY IP BV0 citations48