Inventor
LUM ROBERT
US7 patents
⚠️ This page may combine multiple inventors who share the name “LUM ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS5338398AAug 16, 1994
Tungsten silicide etch process selective to photoresist and oxide
APPLIED MATERIALS INC148 citations92
US6857941B2Feb 22, 2005
Multi-phase polishing pad
APPLIED MATERIALS INC34 citations90
US7048607B1May 23, 2006
System and method for chemical mechanical planarization
APPLIED MATERIALS INC4 citations59