Inventor
ONOSE ALEXANDRU
NL4 patents
Patents
4 patentsUS11994806B2May 28, 2024
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations48
US11556060B2Jan 17, 2023
Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus
ASML NETHERLANDS BV0 citations48
US10429746B2Oct 1, 2019
Estimation of data in metrology
ASML NETHERLANDS BV0 citations37
US10585048B2Mar 10, 2020
Method of determining a value of a parameter of interest of a target formed by a patterning process
ASML NETHERLANDS BV0 citations36