Inventor
GOLDE DANIEL
DE5 patents
Patents
5 patentsUS10048592B2Aug 14, 2018
Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
ZEISS CARL SMT GMBH4 citations71
US12222655B2Feb 11, 2025
Stop, optical system and lithography apparatus
ZEISS CARL SMT GMBH0 citations58
US10591825B2Mar 17, 2020
Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
ZEISS CARL SMT GMBH0 citations50
US12210289B2Jan 28, 2025
Mirror, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations49
US9933710B2Apr 3, 2018
Projection exposure method and projection exposure apparatus
ZEISS CARL SMT GMBH0 citations39