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Inventor
STEY CHRISTOF
DE
2 patents
Patents
2 patents
US6600560B2
Jul 29, 2003
Optical measurement arrangement having an ellipsometer
LEICA MICROSYSTEMS
56 citations
92
US12298490B2
May 13, 2025
Method for automatically determining the position in a sample arrangement and corresponding microscope
LEICA MICROSYSTEMS
0 citations
46