Inventor
KIM IN GI
KR19 patents
⚠️ This page may combine multiple inventors who share the name “KIM IN GI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
15 patentsUS12362204B2Jul 15, 2025
Method of manufacturing semiconductor device using stationary laser module
SAMSUNG ELECTRONICS CO LTD0 citations62
US12042828B2Jul 23, 2024
Wafer cleaning apparatus and wafer cleaning method using the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11742221B2Aug 29, 2023
Dry cleaning apparatus and dry cleaning method
SAMSUNG ELECTRONICS CO LTD0 citations62
US11648594B2May 16, 2023
Wafer cleaning apparatus and wafer cleaning method using the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11631599B2Apr 18, 2023
Semiconductor device manufacturing apparatus including laser module
SAMSUNG ELECTRONICS CO LTD0 citations62
US11605545B2Mar 14, 2023
Wafer cleaning equipment
SAMSUNG ELECTRONICS CO LTD1 citations62
US11087996B2Aug 10, 2021
Dry cleaning apparatus and dry cleaning method
SAMSUNG ELECTRONICS CO LTD0 citations62
US9394509B2Jul 19, 2016
Cleaning solution composition and method of cleaning semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US11721565B2Aug 8, 2023
Multi-chamber apparatus
SAMSUNG ELECTRONICS CO LTD0 citations51
US7405164B2Jul 29, 2008
Apparatus and method for removing a photoresist structure from a substrate
SAMSUNG ELECTRONICS CO LTD0 citations51
US10795263B2Oct 6, 2020
Compositions for removing photoresist
SAMSUNG ELECTRONICS CO LTD0 citations49
US10025192B2Jul 17, 2018
Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate
SAMSUNG ELECTRONICS CO LTD0 citations49
US9772296B2Sep 26, 2017
Method of inspecting a surface of a substrate and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD1 citations47
US11905204B2Feb 20, 2024
Cover glass and electronic device with the same and method for manufacturing cover glass
SAMSUNG ELECTRONICS CO LTD0 citations45
US10332762B2Jun 25, 2019
Chemical liquid supply apparatus and semiconductor processing apparatus having the same
SAMSUNG ELECTRONICS CO LTD0 citations41