Inventor
PEH ENG SHENG
SG19 patents
Patents
19 patentsUS10784134B2Sep 22, 2020
Image based substrate mapper
APPLIED MATERIALS INC2 citations72
US11053590B2Jul 6, 2021
Nozzle for uniform plasma processing
APPLIED MATERIALS INC3 citations70
US10465288B2Nov 5, 2019
Nozzle for uniform plasma processing
APPLIED MATERIALS INC4 citations70
US10504762B2Dec 10, 2019
Bridging front opening unified pod (FOUP)
APPLIED MATERIALS INC2 citations69
US10446423B2Oct 15, 2019
Next generation warpage measurement system
APPLIED MATERIALS INC4 citations69
US10325790B2Jun 18, 2019
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC3 citations67
US11721583B2Aug 8, 2023
Mainframe-less wafer transfer platform with linear transfer system for wafer processing modules
APPLIED MATERIALS INC0 citations61
US11302549B2Apr 12, 2022
Substrate vacuum transport and storage apparatus
APPLIED MATERIALS INC0 citations61
US10566226B2Feb 18, 2020
Multi-cassette carrying case
APPLIED MATERIALS INC1 citations61
US10930542B2Feb 23, 2021
Apparatus for handling various sized substrates
APPLIED MATERIALS INC1 citations59
US12437999B2Oct 7, 2025
Methods and apparatus for mask patterning debris removal
APPLIED MATERIALS INC0 citations58
US12068159B2Aug 20, 2024
Methods and apparatus for mask patterning debris removal
APPLIED MATERIALS INC0 citations58
US11600492B2Mar 7, 2023
Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process
APPLIED MATERIALS INC0 citations56
US12463075B2Nov 4, 2025
Cathode assembly for integration of embedded electrostatic chuck (ESC)
APPLIED MATERIALS INC0 citations53
US11342226B2May 24, 2022
Hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process
APPLIED MATERIALS INC0 citations51
US10347516B2Jul 9, 2019
Substrate transfer chamber
APPLIED MATERIALS INC0 citations51
US10153187B2Dec 11, 2018
Methods and apparatus for transferring a substrate
APPLIED MATERIALS INC1 citations51
US9818624B2Nov 14, 2017
Methods and apparatus for correcting substrate deformity
APPLIED MATERIALS INC1 citations49
US10777442B2Sep 15, 2020
Hybrid substrate carrier
APPLIED MATERIALS INC0 citations42