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Inventor
TONG EDRIC H
US
3 patents
⚠️ This page may combine multiple inventors who share the name “TONG EDRIC H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PROMETRIX CORP
1 patent
US4907931A
Mar 13, 1990
Apparatus for handling semiconductor wafers
PROMETRIX CORP
43 citations
88
APPLIED MATERIALS INC
1 patent
US12548740B2
Feb 10, 2026
Apparatus to improve process non-uniformity for semiconductor direct plasma processing
APPLIED MATERIALS INC
0 citations
56
SENSYS INSTR CORP
1 patent
US6572456B2
Jun 3, 2003
Bathless wafer measurement apparatus and method
SENSYS INSTR CORP
0 citations
45