Inventor
MINO YOSHIKO
JP3 patents
Patents
3 patentsUS6528397B1Mar 4, 2003
Semiconductor thin film, method of producing the same, apparatus for producing the same, semiconductor device and method of producing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD129 citations98
US6806498B2Oct 19, 2004
Semiconductor thin film, method and apparatus for producing the same, and semiconductor device and method of producing the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD37 citations92
US5391913AFeb 21, 1995
Semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD14 citations72