Inventor
SMITH EVERETT D
US6 patents
⚠️ This page may combine multiple inventors who share the name “SMITH EVERETT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
3 patentsUS6143155ANov 7, 2000
Method for simultaneous non-contact electrochemical plating and planarizing of semiconductor wafers using a bipiolar electrode assembly
SPEEDFAM IPEC CORP265 citations98
US6500055B1Dec 31, 2002
Oscillating orbital polisher and method
SPEEDFAM IPEC CORP21 citations92
US6184139B1Feb 6, 2001
Oscillating orbital polisher and method
SPEEDFAM IPEC CORP33 citations92
INTEGRATED PROCESS EQUIPMENT C
2 patentsUS6132586AOct 17, 2000
Method and apparatus for non-contact metal plating of semiconductor wafers using a bipolar electrode assembly
INTEGRATED PROCESS EQUIPMENT C168 citations98
US6121152ASep 19, 2000
Method and apparatus for planarization of metallized semiconductor wafers using a bipolar electrode assembly
INTEGRATED PROCESS EQUIPMENT C106 citations97