Inventor
HOEY GEE SUN
US10 patents
⚠️ This page may combine multiple inventors who share the name “HOEY GEE SUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6419559B1Jul 16, 2002
Using a purge gas in a chemical mechanical polishing apparatus with an incrementally advanceable polishing sheet
APPLIED MATERIALS INC28 citations91
US6217429B1Apr 17, 2001
Polishing pad conditioner
APPLIED MATERIALS INC23 citations91
US6951511B2Oct 4, 2005
Platen with peripheral frame for supporting a web of polishing material in a chemical mechanical planarization system
APPLIED MATERIALS INC6 citations72
US6482072B1Nov 19, 2002
Method and apparatus for providing and controlling delivery of a web of polishing material
APPLIED MATERIALS INC9 citations72
US11705354B2Jul 18, 2023
Substrate handling systems
APPLIED MATERIALS INC2 citations69
US6612914B2Sep 2, 2003
Platen with lateral web tensioner
APPLIED MATERIALS INC6 citations61
US10751738B2Aug 25, 2020
Spray bar design for uniform liquid flow distribution on a substrate
APPLIED MATERIALS INC0 citations45