Inventor
RUSSELL DERREK ANDREW
US7 patents
Patents
7 patentsUS6287435B1Sep 11, 2001
Method and apparatus for ionized physical vapor deposition
TOKYO ELECTRON LTD156 citations96
US6719886B2Apr 13, 2004
Method and apparatus for ionized physical vapor deposition
TOKYO ELECTRON LTD54 citations94
US7059268B2Jun 13, 2006
Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
TOKYO ELECTRON LTD37 citations90
US6458252B1Oct 1, 2002
High target utilization magnetic arrangement for a truncated conical sputtering target
TOKYO ELECTRON LTD24 citations90
US7084573B2Aug 1, 2006
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
TOKYO ELECTRON LTD2 citations61
US7315128B2Jan 1, 2008
Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
TOKYO ELECTRON LTD0 citations51
US7757633B2Jul 20, 2010
Method, apparatus and magnet assembly for enhancing and localizing a capacitively coupled plasma
TOKYO ELECTRON LTD0 citations50