Inventor
GITTLEMAN BRUCE DAVID
US3 patents
Patents
3 patentsUS6287435B1Sep 11, 2001
Method and apparatus for ionized physical vapor deposition
TOKYO ELECTRON LTD156 citations96
US6719886B2Apr 13, 2004
Method and apparatus for ionized physical vapor deposition
TOKYO ELECTRON LTD54 citations94
US6107195AAug 22, 2000
Method for depositing a low-resistivity titanium-oxynitride (TiON) film that provides for good texture of a subsequently deposited conductor layer
TOKYO ELECTRON LTD11 citations71