Inventor
TSENG JUNG-NAN
TW6 patents
Patents
6 patentsUS6341995B1Jan 29, 2002
Chemical mechanical polishing apparatus
UNITED MICROELECTRONICS CORP15 citations83
US6682399B1Jan 27, 2004
Pressure monitoring system for chemical-mechanical polishing
UNITED MICROELECTRONICS CORP10 citations72
US6416615B1Jul 9, 2002
Device for detecting abnormality in chemical-mechanical polishing operation
UNITED MICROELECTRONICS CORP8 citations72
US6648729B2Nov 18, 2003
Wafer pressure regulation system for polishing machine
UNITED MICROELECTRONICS CORP8 citations70
US6267654B1Jul 31, 2001
Pad backer for polishing head of chemical mechanical polishing machine
UNITED MICROELECTRONICS CORP0 citations51
US6676801B2Jan 13, 2004
Pressure suppression device for chemical mechanical polishing machine and method thereof
UNITED MICROELECTRONICS CORP1 citations50