Inventor
ROBERTSON ROBERT MCCORMICK
US8 patents
⚠️ This page may combine multiple inventors who share the name “ROBERTSON ROBERT MCCORMICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED KOMATSU TECHNOLOGY INC
4 patentsUS6055927AMay 2, 2000
Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology
APPLIED KOMATSU TECHNOLOGY INC129 citations99
US6177023B1Jan 23, 2001
Method and apparatus for electrostatically maintaining substrate flatness
APPLIED KOMATSU TECHNOLOGY INC19 citations92
US6294219B1Sep 25, 2001
Method of annealing large area glass substrates
APPLIED KOMATSU TECHNOLOGY INC17 citations90
US6468601B1Oct 22, 2002
Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology
APPLIED KOMATSU TECHNOLOGY INC14 citations84
APPLIED MATERIALS INC
3 patentsUS6902682B2Jun 7, 2005
Method and apparatus for electrostatically maintaining substrate flatness
APPLIED MATERIALS INC21 citations92
US6500265B1Dec 31, 2002
Apparatus for electrostatically maintaining subtrate flatness
APPLIED MATERIALS INC16 citations92
US6610374B2Aug 26, 2003
Method of annealing large area glass substrates
APPLIED MATERIALS INC11 citations71