Inventor

TAKIGAWA SHIROU

JP2 patents

Patents

2 patents

US6373025B1Apr 16, 2002

Apparatus and method for laser fusion bonding

SHINMAYWA IND LTD25 citations88

US6579428B2Jun 17, 2003

Arc evaporator, method for driving arc evaporator, and ion plating apparatus

SHINMAYWA IND LTD9 citations71