Inventor
MICHAELIAN MARK E
US4 patents
Patents
4 patentsUS6973164B2Dec 6, 2005
Laser-produced plasma EUV light source with pre-pulse enhancement
UNIV CENTRAL FLORIDA RES FOUND53 citations89
US6835944B2Dec 28, 2004
Low vapor pressure, low debris solid target for EUV production
UNIV CENTRAL FLORIDA RES FOUND15 citations82
US6933515B2Aug 23, 2005
Laser-produced plasma EUV light source with isolated plasma
UNIV CENTRAL FLORIDA RES FOUND14 citations79
US6912267B2Jun 28, 2005
Erosion reduction for EUV laser produced plasma target sources
UNIV CENTRAL FLORIDA RES FOUND9 citations72