Inventor
SHIELDS HENRY
US14 patents
⚠️ This page may combine multiple inventors who share the name “SHIELDS HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JMAR TECHNOLOGY CO
6 patentsUS5940418AAug 17, 1999
Solid-state laser system for ultra-violet micro-lithography
JMAR TECHNOLOGY CO100 citations97
US5790574AAug 4, 1998
Low cost, high average power, high brightness solid state laser
JMAR TECHNOLOGY CO127 citations97
US5742634AApr 21, 1998
Picosecond laser
JMAR TECHNOLOGY CO137 citations97
US5539764AJul 23, 1996
Laser generated X-ray source
JMAR TECHNOLOGY CO86 citations95
US5434875AJul 18, 1995
Low cost, high average power, high brightness solid state laser
JMAR TECHNOLOGY CO94 citations95
US5491707AFeb 13, 1996
Low cost, high average power, high brightness solid state laser
JMAR TECHNOLOGY CO36 citations92
UNIV CENTRAL FLORIDA RES FOUND
4 patentsUS6973164B2Dec 6, 2005
Laser-produced plasma EUV light source with pre-pulse enhancement
UNIV CENTRAL FLORIDA RES FOUND53 citations89
US6835944B2Dec 28, 2004
Low vapor pressure, low debris solid target for EUV production
UNIV CENTRAL FLORIDA RES FOUND15 citations82
US6933515B2Aug 23, 2005
Laser-produced plasma EUV light source with isolated plasma
UNIV CENTRAL FLORIDA RES FOUND14 citations79
US6912267B2Jun 28, 2005
Erosion reduction for EUV laser produced plasma target sources
UNIV CENTRAL FLORIDA RES FOUND9 citations72