Inventor · disambiguated record
Steven W. Fornaca
Also filed as: FORNACA STEVEN W · FORNACA STEVEN WAYNE
8 granted patents·1 pending application·178 citations·filing 1996–2006
89Inventor score
Top patents by PatentIndex Score
9 records- 0186US6973164B2Laser-produced plasma EUV light source with pre-pulse enhancementUNIV CENTRAL FLORIDA RES FOUND·Filed 2003·Granted Dec 6, 2005·53 cites·24 claims
- 0279US6479830B1Low-sputter-yield coating for hardware near laser-produced plasmaTRW INC·Filed 2000·Granted Nov 12, 2002·21 cites·9 claims
- 0376US6792076B2Target steering system for EUV droplet generatorsNORTHROP GRUMMAN CORP·Filed 2002·Granted Sep 14, 2004·21 cites·18 claims
- 0470US6835944B2Low vapor pressure, low debris solid target for EUV productionUNIV CENTRAL FLORIDA RES FOUND·Filed 2002·Granted Dec 28, 2004·15 cites·25 claims
- 0567US6933515B2Laser-produced plasma EUV light source with isolated plasmaUNIV CENTRAL FLORIDA RES FOUND·Filed 2003·Granted Aug 23, 2005·14 cites·11 claims
- 0663US6912267B2Erosion reduction for EUV laser produced plasma target sourcesUNIV CENTRAL FLORIDA RES FOUND·Filed 2002·Granted Jun 28, 2005·9 cites·22 claims
- 0756US5789622AFocal plane array calibration methodTRW INC·Filed 1996·Granted Aug 4, 1998·23 cites·23 claims
- 0844US5999122AMillimeter wave instant photographic cameraTRW INC·Filed 1998·Granted Dec 7, 1999·22 cites·23 claims
- 0937US2007267220A1Methane extraction method and apparatus using high-energy diode lasers or diode-pumped solid state lasersNORTHROP GRUMMAN CORP·Filed 2006·Application pending·0 cites
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