Inventor
HSU OSCAR KAI CHI
US8 patents
⚠️ This page may combine multiple inventors who share the name “HSU OSCAR KAI CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS6383066B1May 7, 2002
Multilayered polishing pad, method for fabricating, and use thereof
IBM91 citations96
US6712681B1Mar 30, 2004
Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
IBM26 citations91
US6340325B1Jan 22, 2002
Polishing pad grooving method and apparatus
IBM31 citations91