Inventor
HYTROS MARK M
US3 patents
Patents
3 patentsUS6998014B2Feb 14, 2006
Apparatus and method for plasma assisted deposition
APPLIED MATERIALS INC167 citations98
US6827815B2Dec 7, 2004
Showerhead assembly for a processing chamber
APPLIED MATERIALS INC133 citations95
US7779784B2Aug 24, 2010
Apparatus and method for plasma assisted deposition
APPLIED MATERIALS INC8 citations83