Inventor

SON HYOUNG-KYU

KR11 patents

⚠️ This page may combine multiple inventors who share the name “SON HYOUNG-KYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE YOUNG JONG

3 patents

US8075691B2Dec 13, 2011

ADP ENGINEERING CO LTD

2 patents

US7988817B2Aug 2, 2011

Lift pin driving device and a flat panel display manufacturing apparatus having same

ADP ENGINEERING CO LTD39 citations90

US7770478B2Aug 10, 2010

Apparatus and method for measuring chuck attachment force

ADP ENGINEERING CO LTD6 citations60

SEMES CO LTD

2 patents

US11408071B2Aug 9, 2022

Gas supplying unit of substrate treating apparatus

SEMES CO LTD0 citations62

US12362148B2Jul 15, 2025

Apparatus for treating substrate and assembly for distributing gas

SEMES CO LTD0 citations50

ADVANCED DISPLAY PROC ENG CO

2 patents

US8349082B2Jan 8, 2013

Vacuum processing apparatus

ADVANCED DISPLAY PROC ENG CO0 citations50

US7690913B2Apr 6, 2010

Embossing apparatus and method

ADVANCED DISPLAY PROC ENG CO0 citations50

SON HYOUNG-KYU

1 patent

US8623173B2Jan 7, 2014

Substrate processing apparatus having electrode member

SON HYOUNG-KYU6 citations68

SON HYOUNG KYU

1 patent

US8834673B2Sep 16, 2014

Process chamber having gate slit opening and closing apparatus

SON HYOUNG KYU0 citations36