Inventor
SHIBUKAWA JUN
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIBUKAWA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
4 patentsUS9050635B2Jun 9, 2015
Substrate processing apparatus
DAINIPPON SCREEN MFG10 citations81
US10040102B2Aug 7, 2018
Substrate processing method
DAINIPPON SCREEN MFG3 citations70
US8919358B2Dec 30, 2014
Substrate processing apparatus
DAINIPPON SCREEN MFG5 citations70
US9327918B2May 3, 2016
Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate
DAINIPPON SCREEN MFG3 citations68