Inventor
KIYOKAWA SHINJI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KIYOKAWA SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
4 patentsUS5289263AFeb 22, 1994
Apparatus for exposing periphery of an object
DAINIPPON SCREEN MFG33 citations91
US9050635B2Jun 9, 2015
Substrate processing apparatus
DAINIPPON SCREEN MFG10 citations81
US10040102B2Aug 7, 2018
Substrate processing method
DAINIPPON SCREEN MFG3 citations70
US8919358B2Dec 30, 2014
Substrate processing apparatus
DAINIPPON SCREEN MFG5 citations70