Inventor
TAKAMURE NOBORU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TAKAMURE NOBORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT NV
6 patentsUS10147600B2Dec 4, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV417 citations99
US9875893B2Jan 23, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV419 citations99
US9564314B2Feb 7, 2017
Methods for forming doped silicon oxide thin films
ASM INT NV465 citations99
US10510530B2Dec 17, 2019
Methods for forming doped silicon oxide thin films
ASM INT NV3 citations84
US11302527B2Apr 12, 2022
Methods for forming doped silicon oxide thin films
ASM INT NV1 citations73
US10784105B2Sep 22, 2020
Methods for forming doped silicon oxide thin films
ASM INT NV2 citations73
ASM IP HOLDING BV
4 patentsUS9455138B1Sep 27, 2016
Method for forming dielectric film in trenches by PEALD using H-containing gas
ASM IP HOLDING BV587 citations99
US8912101B2Dec 16, 2014
Method for forming Si-containing film using two precursors by ALD
ASM IP HOLDING BV522 citations99
US9556516B2Jan 31, 2017
Method for forming Ti-containing film by PEALD using TDMAT or TDEAT
ASM IP HOLDING BV483 citations96
US9673092B2Jun 6, 2017
Film forming apparatus, and method of manufacturing semiconductor device
ASM IP HOLDING BV2 citations73