Inventor
KLEEMANS NIEK ANTONIUS JACOBUS MARIA
NL4 patents
Patents
4 patentsUS9835950B2Dec 5, 2017
Radiation source
ASML NETHERLANDS BV4 citations66
US10588211B2Mar 10, 2020
Radiation source having debris control
ASML NETHERLANDS BV1 citations52
US9964852B1May 8, 2018
Source collector apparatus, lithographic apparatus and method
ASML NETHERLANDS BV0 citations45
US9841680B2Dec 12, 2017
Source collector apparatus, lithographic apparatus and method
ASML NETHERLANDS BV0 citations45