Inventor

HOFSTRA RAMON MARK

NL3 patents

Patents

3 patents

US9835950B2Dec 5, 2017

Radiation source

ASML NETHERLANDS BV4 citations66

US11237491B2Feb 1, 2022

Reflective optical element for a radiation beam

ASML NETHERLANDS BV2 citations63

US10222702B2Mar 5, 2019

Radiation source

ASML NETHERLANDS BV1 citations58