Inventor
KUMAKURA KAYO
JP20 patents
Patents
20 patentsUS9333736B2May 10, 2016
Processing apparatus and processing method of stack
SEMICONDUCTOR ENERGY LAB17 citations93
US9437832B2Sep 6, 2016
Light-emitting device and peeling method
SEMICONDUCTOR ENERGY LAB22 citations92
US9257560B2Feb 9, 2016
Method of semiconductor device including step of cutting substrate at opening of insulating layer
SEMICONDUCTOR ENERGY LAB16 citations92
US10629831B2Apr 21, 2020
Separation method, display device, display module, and electronic device
SEMICONDUCTOR ENERGY LAB5 citations84
US10134904B2Nov 20, 2018
Semiconductor device having a flexible substrate and a crack-preventing semiconductor layer
SEMICONDUCTOR ENERGY LAB11 citations84
US10040175B2Aug 7, 2018
Film-like member support apparatus
SEMICONDUCTOR ENERGY LAB4 citations73
US9682544B2Jun 20, 2017
Processing apparatus and processing method of stack
SEMICONDUCTOR ENERGY LAB3 citations73
US10141526B2Nov 27, 2018
Peeling method using separating peeling layer and layer to be peeled
SEMICONDUCTOR ENERGY LAB4 citations72
US10079353B2Sep 18, 2018
Light-emitting device with flexible substrates
SEMICONDUCTOR ENERGY LAB3 citations72
US11856836B2Dec 26, 2023
Semiconductor device comprising adhesive layer and resin layer
SEMICONDUCTOR ENERGY LAB0 citations62
US11616206B2Mar 28, 2023
Separation method, display device, display module, and electronic device
SEMICONDUCTOR ENERGY LAB0 citations62
US11232944B2Jan 25, 2022
Fabrication method of semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations62
US11133491B2Sep 28, 2021
Fabrication method of semiconductor device and semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations62
US10930870B2Feb 23, 2021
Separation method, display device, display module, and electronic device
SEMICONDUCTOR ENERGY LAB0 citations62
US10923350B2Feb 16, 2021
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations62
US10442172B2Oct 15, 2019
Processing apparatus and processing method of stack
SEMICONDUCTOR ENERGY LAB0 citations52
US10343191B2Jul 9, 2019
Wiping device and stack manufacturing apparatus
SEMICONDUCTOR ENERGY LAB0 citations52
US10475820B2Nov 12, 2019
Peeling method, display device, module, and electronic device
SEMICONDUCTOR ENERGY LAB0 citations51
US10096621B2Oct 9, 2018
Peeling method, display device, module, and electronic device
SEMICONDUCTOR ENERGY LAB0 citations51
US9808937B2Nov 7, 2017
Film suction mechanism
SEMICONDUCTOR ENERGY LAB0 citations42