Inventor
TENG CHING-WEN
SG4 patents
⚠️ This page may combine multiple inventors who share the name “TENG CHING-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
3 patentsUS7052376B1May 30, 2006
Wafer carrier gap washer
UNITED MICROELECTRONICS CORP11 citations77
US7004820B1Feb 28, 2006
CMP method and device capable of avoiding slurry residues
UNITED MICROELECTRONICS CORP7 citations66
US7432205B2Oct 7, 2008
Method for controlling polishing process
UNITED MICROELECTRONICS CORP3 citations58