Inventor

VATUS JEAN

FR3 patents

⚠️ This page may combine multiple inventors who share the name “VATUS JEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PATALAY KAILASH KIRAN

1 patent

US8951351B2Feb 10, 2015

Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects

PATALAY KAILASH KIRAN5 citations69

THOMSON CSF

1 patent

US4742026AMay 3, 1988

Method for the selective dry etching of layers of III-V group semiconductive materials

THOMSON CSF16 citations68

APPLIED MATERIALS INC

1 patent

US8747560B2Jun 10, 2014

System and method for pedestal adjustment

APPLIED MATERIALS INC2 citations60