Inventor
IINO HIROYUKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IINO HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6033475AMar 7, 2000
Resist processing apparatus
TOKYO ELECTRON LTD90 citations97
US5658615AAug 19, 1997
Method of forming coating film and apparatus therefor
TOKYO ELECTRON LTD187 citations97
US6063190AMay 16, 2000
Method of forming coating film and apparatus therefor
TOKYO ELECTRON LTD94 citations96
US5942035AAug 24, 1999
Solvent and resist spin coating apparatus
TOKYO ELECTRON LTD103 citations96