Inventor
TANAKA KAZUSHIGE
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA KAZUSHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI GAS CHEMICAL CO
3 patentsUS5302311AApr 12, 1994
Cleaning solution of semiconductor substrate
MITSUBISHI GAS CHEMICAL CO66 citations94
US5705089AJan 6, 1998
Cleaning fluid for semiconductor substrate
MITSUBISHI GAS CHEMICAL CO133 citations93
US5614165AMar 25, 1997
Process for purification of hydrogen peroxide
MITSUBISHI GAS CHEMICAL CO13 citations71