Inventor
KANARSKY THOMAS SAFRON
US9 patents
⚠️ This page may combine multiple inventors who share the name “KANARSKY THOMAS SAFRON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS8043920B2Oct 25, 2011
finFETS and methods of making same
IBM91 citations97
US6218236B1Apr 17, 2001
Method of forming a buried bitline in a vertical DRAM device
IBM36 citations91
US5759437AJun 2, 1998
Etching of Ti-W for C4 rework
IBM20 citations91
US5796168AAug 18, 1998
Metallic interconnect pad, and integrated circuit structure using same, with reduced undercut
IBM30 citations90
US7413941B2Aug 19, 2008
Method of fabricating sectional field effect devices
IBM5 citations73
US6238589B1May 29, 2001
Methods for monitoring components in the TiW etching bath used in the fabrication of C4s
IBM14 citations70
US7659153B2Feb 9, 2010
Sectional field effect devices and method of fabrication
IBM3 citations62
US7388258B2Jun 17, 2008
Sectional field effect devices
IBM4 citations62