Inventor
ADETUTU OLUBUNMI
US10 patents
Patents
10 patentsUS6713381B2Mar 30, 2004
Method of forming semiconductor device including interconnect barrier layers
MOTOROLA INC135 citations95
US6268289B1Jul 31, 2001
Method for protecting the edge exclusion of a semiconductor wafer from copper plating through use of an edge exclusion masking layer
MOTOROLA INC57 citations94
US6004850ADec 21, 1999
Tantalum oxide anti-reflective coating (ARC) integrated with a metallic transistor gate electrode and method of formation
MOTOROLA INC58 citations94
US5888588AMar 30, 1999
Process for forming a semiconductor device
MOTOROLA INC62 citations94
US6376349B1Apr 23, 2002
Process for forming a semiconductor device and a conductive structure
MOTOROLA INC29 citations92
US6294820B1Sep 25, 2001
Metallic oxide gate electrode stack having a metallic gate dielectric metallic gate electrode and a metallic arc layer
MOTOROLA INC33 citations90
US6084279AJul 4, 2000
Semiconductor device having a metal containing layer overlying a gate dielectric
MOTOROLA INC31 citations90
US5882243AMar 16, 1999
Method for polishing a semiconductor wafer using dynamic control
MOTOROLA INC34 citations90
US6136678AOct 24, 2000
Method of processing a conductive layer and forming a semiconductor device
MOTOROLA INC18 citations80
US5721167AFeb 24, 1998
Process for forming a semiconductor device and a static-random-access memory cell
MOTOROLA INC9 citations70