Inventor

SCHEIBERLICH ARIE CORNELIS

NL2 patents

⚠️ This page may combine multiple inventors who share the name “SCHEIBERLICH ARIE CORNELIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS STIFTUNG

1 patent

US6388823B1May 14, 2002

Optical system, especially a projection light facility for microlithography

ZEISS STIFTUNG126 citations96

ASML NETHERLANDS BV

1 patent

US11664264B2May 30, 2023

Lithographic apparatus, method for unloading a substrate and method for loading a substrate

ASML NETHERLANDS BV2 citations66