Inventor
MACHIA KEITH J
US5 patents
⚠️ This page may combine multiple inventors who share the name “MACHIA KEITH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6944578B2Sep 13, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM9 citations69
US6917901B2Jul 12, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
IBM8 citations69
US6674516B2Jan 6, 2004
Method of photolithographic exposure dose control as a function of resist sensitivity
IBM4 citations60
US6856378B2Feb 15, 2005
Method of photolithographic exposure dose control as a function of resist sensitivity
IBM0 citations49