Inventor
PARRISH CHARLES J
US4 patents
⚠️ This page may combine multiple inventors who share the name “PARRISH CHARLES J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS6694498B2Feb 17, 2004
Feed-forward lithographic overlay offset method and system
IBM15 citations82
US6674516B2Jan 6, 2004
Method of photolithographic exposure dose control as a function of resist sensitivity
IBM4 citations60
US6856378B2Feb 15, 2005
Method of photolithographic exposure dose control as a function of resist sensitivity
IBM0 citations49